| Sensor Name | Description | Low Alarm | High Alarm | Current Value | Units | Status |
| EF_12 | Lab exhaust alarm (zero indicates no alarm, i.e. exhaust is on). | -0.5 | 0.5 | 0 | on/off |
|
| EF_34 | Silane exhaust alarm (zero indicates no alarm, i.e. exhaust is on). | -0.5 | 0.5 | 0 | on/off |
|
| Low_Level_Gas_Warn | Low level gas warning from any zone (zero indicates no warning-level alarms). | -0.5 | 0.5 | 0 | on/off |
|
| AWN_Chemical_Low_Alarm | Check NaOH and H2SO4 levels on alarm (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| AWN_General_Alarm | State of the Acid Waste Neutralizer general alarm (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| AWN_Surge_Tank_Level | Acid Waste Neutralizer surge tank level, stage 0. | 150 | 450 | 211.6 | gal |
|
| Compressed_Air_Dew_Point | Pressure dew point measured at the compressed air source. | -112 | -40 | -76.82 | F |
|
| Compressed_Air_General_Alarm | Genaral alarm state of the dryer controller (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| Compressed_Air_N2_Backup | State of the CDA N2 backup valve (zero indicates no alarm, i.e. N2 backup is not in use). | -0.5 | 0.5 | 0 | on/off |
|
| Compressed_Air_Pressure | The pressure of the compressed air on the compressor side of the check valve. | 90 | 130 | 113.58 | psi |
|
| DI_General_Alarm | State of the DI general alarm (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| DI_Makeup_Flow | Rate of flow from the RO system to the DI system. | -1 | 25 | 17.15 | gpm |
|
| DI_Resistivity | The final resisitivity of the DI source. | 16.5 | 18.5 | 18.02 | MOhm-cm |
|
| DI_Tank_Level | Deionized Water tanks level (sum of both tanks). | 1500 | 2350 | 1997.09 | gal |
|
| PCW_Flow | Process Cooling Water supply flow rate. | 35 | 400 | 276.07 | gpm |
|
| PCW_General_Alarm | State of the Process Cooling Water general alarm (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| PCW_ICW_Crossover | State of the FCV (0 indicates PCW recirc, not crossed over) | -0.5 | 0.5 | 0 | on/off |
|
| PCW_Pressure | Process Cooling Water supply pressure. | 50 | 110 | 87.35 | psi |
|
| PCW_Resistivity | Resistivity of the PCW loop. | 170 | 300 | 243.36 | kOhm-cm |
|
| PCW_Temperature | Process Cooling Water supply Temperature. | 55 | 70 | 61.59 | F |
|
| Process_Vacuum | Process vacuum pressure. | 24 | 32 | 27.08 | inHg |
|
| Argon_Pressure | Pre-process argon pressure in 395; pressures less than 40 psi indicate lag bottle is sourcing. | 30 | 65 | 45.76 | psi |
|
| N2_Flow_Rate | Flow rate of N2 at shipping and receiving. | 500 | 2600 | 1889.19 | slpm |
|
| N2_Pressure | N2 pressure at shipping and receiving. | 75 | 100 | 91.32 | psi |
|
| O2_Flow_rate | O2 flow rate at shipping and receiving. | -5 | 35 | 2.1 | slpm |
|
| O2_Pressure | O2 pressure at shipping and receiving. | 22 | 45 | 33.98 | psi |
|
| Gas_Cabinet_Alarm_L3 | State of gas cabinets in the L3 gas vault (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| Gas_Cabinet_Alarm_L5 | State of gas cabinets in the L5 gas vault (zero indicates no alarm). | -0.5 | 0.5 | 0 | on/off |
|
| GCAWS_AC_Secondary_H2O | Water detection switch in the GCAWS AC trays. | -0.5 | 0.5 | 0 | on/off |
|
| Lab_3_Relative_Humidity | Relative humidity in 384. | 20 | 72 | 52.53 | percent |
|
| Lab_3_Temperature | Temperature in 384. | 60 | 75 | 66.64 | F |
|
| Lab_5_Relative_Humidity | Relative humidity in 584. | 20 | 72 | 48.19 | percent |
|
| Lab_5_Temperature | Temperature in 584. | 55 | 75 | 67.06 | F |
|
| NH3_599_Weight_lbs | Weight of NH3 Cylinder in Rm 599 | 125 | 180 | 127.75 | |
|
| PCW_Pressure_L5 | 5th Floor Lab PCW Pressure | 40 | 80 | 61.62 | psi |
|
| Test | RUMS test channel (for internal use only). | -0.5 | 0.5 | 2.63 | test |
|
